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Fluocon® PFPE Vacuum Pump Oils for High-Vacuum and Corrosive Applications
PFPE & Fluorochemicals

Fluocon® PFPE Vacuum Pump Oils for High-Vacuum and Corrosive Applications

Fluocon® PFPE Vacuum Pump Oil is Chemically inert PFPE vacuum pump oil with ultra-low vapor pressure for extreme high-vacuum systems.Fluocon® L series PFPE oil is a hydrogen-free synthetic lubricant designed for rotary, roots, and diffusion pumps. It provides unmatched thermal stability and oxidation resistance in corrosive environments where standard oils fail.

Key Technical Advantages:

  • Zero Flash/Fire Point:Inherent non-flammabilityfor maximum safety.
  • Exceptional Chemical Resistance:Stable against aggressive solvents and reactive gases.
  • Broad Material Compatibility:Safe for metals, plastics, and elastomers.
  • Extended Service Life:Low evaporation loss and superior radiation stability.

    The Pinnacle of Vacuum Lubrication

    Fluocon® PFPE Vacuum Pump Oils: High-Performance Lubrication for Extreme Vacuum Environments

    Fluocon® PFPE Vacuum Pump Oils represent the ultimate hydrogen-free lubrication solution, offering ultra-low vapor pressure and exceptional thermal-oxidative stability for demanding high-vacuum applications. Specifically engineered for systems where conventional mineral or synthetic oils fail, Fluocon® L series lubricants are built on a robust linear Perfluoropolyether backbone. By eliminating hydrogen atoms, this advanced fluid achieves a level of chemical inertness that is unmatched in the industry. Whether you are managing corrosive gas flows in semiconductor etching or maintaining high-integrity vacuum seals in aerospace research, Fluocon® PFPE vacuum pump oil ensures zero carbonization, minimal outgassing, and an extended service life that significantly reduces your total cost of ownership.

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    Fluocon L PFPE vacuum pump oil for semiconductor etching turbo pump, zero-outgassing
    Fluocon L hydrogen-free PFPE synthetic lubricant for Roots vacuum pumps, technical molecular view

    Advanced Chemical Composition & Manufacturing

    The superior performance of Fluocon® PFPE fluids begins at the molecular level. Unlike standard vacuum oils, our PFPE is a polymeric chain composed exclusively of Carbon, Fluorine, and Oxygen. This unique hydrogen-free architecture is achieved through a high-precision polymerization process, resulting in a fluid that does not react with Lewis acids or strong oxidizing agents. The manufacturing process ensures a tight molecular weight distribution (ranging from 1,850 to 4,300 AMU), providing consistent kinematic viscosity across various grades—from the lightweight L2-06 to the robust H4-40. This purity is critical for preventing the formation of acidic by-products and sludge, which are common causes of pump failure in aggressive chemical environments.

    Multi-Dimensional Performance Advantages

    Fluocon® PFPE Vacuum Pump Oils are defined by their ability to provide solutions where others provide compromises:

    1. Ultra-Low Vapor Pressure: With values as low as 5×107 torr at 25℃, our fluids enable the achievement of ultimate total pressure targets in high-vacuum systems.
    2. Inherent Non-Flammability: Featuring no flash or fire point, these oils provide an essential safety margin in oxygen-rich or high-heat environments.
    3. Superior Material Compatibility: Fluocon® is completely non-reactive with most metals, plastics, elastomers, and rubbers, ensuring the integrity of your O-rings and seals.
    4. Extreme Thermal Stability: Resistant to thermal breakdown even at continuous operating temperatures exceeding 200 ℃, preventing oil consumption and deposit formation.
    5. Radiation & Chemical Resistance: Ideal for nuclear and chemical processing industries where radiation stability and resistance to aqueous/non-aqueous solvents are mandatory.
    Fluocon L chemically inert PFPE oil protects rotary vane vacuum pump against corrosive gases

    Industry Solutions & Application Scenarios

    Our PFPE vacuum pump oils are the trusted choice across a wide spectrum of high-tech industries:

    • 01

      Semiconductor & Electronics

      Essential for Rotary Pumps and Turbomolecular Pumps handling etching and CVD gases.

    • 02

      Industrial High Vacuum

      Optimized for Roots Pumps and Diffusion Pumps requiring low heat of vaporization and high dielectric properties.

    • 03

      Chemical & Pharmaceutical

      Providing reliable sealing and lubrication for pumps exposed to highly reactive reagents and solvents.

    • 04

      Data Center & Lab Equipment 

      Used in mass spectrometers and high-density computing

    Application (Pump Type)

    L2-06

    L2-14

    L3-16

    L3-25

    L3-40

    L4-15

    Rotary Vane Pumps (Sealing & Lubrication)

     

     

     

    Turbomolecular Pumps (Lubrication)

     

     

     

     

     

    Roots Pumps (Lubrication)

     

     

     

     

    Diffusion Pumps (Working Fluids)

     

     

    Technical Specifications

    Properties

    Typical values

    Grade

    L2-06

    L2-14

    L3-16

    L3-25

    H3-25

    H4-40

    Molecular Weight (AMU)

    1,850

    2,600

    2,800

    3,450

    3,650

    4,300

    Kinematic Viscosity @ 20°C (cSt)

    65

    150

    163

    260

    275

    463

    Viscosity Index (ASTM D2270)

    72

    98

    105

    110

    118

    -

    Pour Point (°C) (ASTM D97)

    -52

    -45

    -45

    -35

    -35

    -32

    Vapor Pressure @ 25°C (torr)

    7x10-7

    1x10-7

    2x10-6

    5x10-7

    -

    -

    Vapor Pressure @ 100°C (torr)

    3x10-3

    2x10-4

    2x10-4

    5x10-5

    -

    -

    Heat of Vaporization @ 200°C (cal/g)

    11

    8

    8

    7

    7

    7

    Density @ 20°C (g/cm³)

    1.88

    1.89

    1.9

    1.91

    1.91

    1.91

    Surface Tension (dyne/cm)

    21

    22

    22

    22

    20

    20

    Evaporation Loss 22hrs @ 149°C (% by wt)

    -

    4

    3.5

    0.8

    0.5

    -

    Evaporation Loss 22hrs @ 120°C (% by wt)

    4*

    -

    -

    -

    -

    -

    Ultimate Total Pressure (torr)

    1.7x10-3

    1.4x10-3

    2.4x10-3

    1.2x10-3

    -

    -

    Specific Oil Consumption (cm³/hr)

    0.4

    0.6

    0.5

    0.7

    -

    -

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